TEGAL Wafer Processing Components, Parts, and Accessories

Shop and Compare TEGAL Wafer Processing Components, Parts, and Accessories on Whohou.com Marketplace.


TEGAL ENDPOINT DETECTOR CD1151-00102 99-249-002 PCB REV K (404089021793)
TEGAL 99-247-002 REV. A PCB SPI-2 (404035075989)
TEGAL 99-126-003 PCB PLASMA ETCHER (404088948680)
Tegal 903e Tegal 901e Ceramic Ring For 4 Inch Chuck , 40-294-003 ? (202300330238)
Top Electrode , For Tegal 903e Tegal 901e Plasma Etcher (203971877820)
Tegal 903e Tegal 901e Ceramic Ring For 4 Inch Wafer? Plasma Etcher (203971850393)
39-680-003 Rev D Top Electrode , For Tegal 903e Tegal 901e Plasma Etcher (203971858879)
Tegal 903e Tegal 901e Ceramic Ring For 5 Inch Wafer? Plasma Etcher (203971848943)
Tylan 2900 Series SF6 25 SCCM , MFC,Tylan,From Tegal Matrix DX-1-4-011 (203944618630)
Tylan 2900 Series He 200 SCCM , MFC,Tylan,From Tegal Matrix DX-1-4-012 (203944619549)
Tylan 2900 Series CHF3 50 SCCM , MFC,Tylan,From Tegal Matrix DX-1-4-010 (203944618190)
Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361 (321894510905)
MKS MFC 1179A22646 N2 10 SCCM , From Tegal 901e 903e Plasma DX-1-3-029 (203944574631)
MKS MFC O2 1000 SCCM 117A01514CR1CV , From Tegal 901e 903e Plasma DX-1-3-018 (203944549406)
MKS MFC 1159B-00020RV-Spcal He 20 SCCM , From Tegal 901e 903e Plasma DX-1-3-031 (203944590504)
FC-280 SAV N2 300 SCCM , Tylan,From Tegal Matrix Plasma DX-1-3-019 (203944550666)
FC-280 SAV SF6 15 SCCM , Tylan,From Tegal Matrix Plasma DX-4-033 (203946313352)
Tylan 2900 Series PC5900 U10V N2 100 SCCM , Tylan,From Tegal Matrix DX-1-3-030 (203944572033)
TEGAL PLASMA 903 (304978323846)
FC-2900, Tylan,Unit UFC-1100 MFC,From Tegal Matrix Plasma DX-1-3-033 (203944595361)
Tegal Gas DLVY CG11015-01102 W/ UFC-1100 UFC-1020 UFC-1 500A MFC ,901e 903e Etch (203963147968)
Tegal Gas DLVY CG1145-01801 W/ UFC-8100 UFC-1660 UFC-1100A MFC ,901e 903e (203963104543)
29003 TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202 (125421243599)
Tegal 901e Tegal 903e PCA, EOP Control Module 90-1045-01 REV G (202287465029)
AC Box Electrical Cabinet For Tegal 901e Tegal 903e AWR-63 (203963082055)
AC Box Electrical Cabinet For Tegal 901e Tegal 903e AWR-62 (203963077721)
3210 TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E (123003699721)
Vacuum valve, KF-40. Tegal P/N (186039245827)
Integrated Circuit Support ICS-40-395-001 Ceramic Ring, Flat 6", 410497 (221918078550)
Profacture PRO-81-007-077 Kit Int Pneumatic Valve Assembly, NW40, 410409 (321895438490)
Model ACG-10B-03 ENI Power Systems RF Generator For Tegal 901e Tegal 903e AWR-64 (203963154366)
Model ACG-10 ENI Power Systems RF Generator For Tegal 901e Tegal 903e (202400910548)
Edwards E2M40 High Vacuum Pump W/ Outlet Mist Filter For Tegal 901e 903e AWR-61 (203963061064)
ACG-10T / ACG-10-11631-51 RF Generator For Tegal 901e Tegal 903e AWR-65 (203963163893)
ACG-10T RF Generator For Tegal 901e Tegal 903e CR 1112-00203 /00203RW Location D (203966653016)

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