TEGAL Wafer Processing Equipment, Parts, and Accessories

Shop and Compare TEGAL Wafer Processing Equipment, Parts, and Accessories on Whohou.com Marketplace.

C188655 Tegal Corp. 803 Plasma Line Inline Etcher w/3 RF Match Matching Network (295844534684)
C190658 Tegal PLASMOD Plasma Etcher/Cleaner/Barrel Asher w/(2) Eimac 8187/4PR65A (395016101770)
Pressure/ Vacuum W/ATM SNS CC1146-01201, Tegal 901e, 903e , 915 Plasma Etcher (203932034319)
Gas DLVY Item CG1145 W00831 ? For Tegal 901e, 903e , 915 Plasma Etcher (203932057899)
Gas DLVY Item CG1145 W00831 For Tegal 901e, 903e , 915 Plasma Etcher (203932039220)
Gas DLVY Item CG1145-02001 For Tegal 901e, 903e , 915 Plasma Etcher (203932071334)
Item CR1113-00801RW W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-014 (203052382672)
Item CR1113-00301 RF Matching Network For Tegal 901e 903e DQ-2-001 (203045374380)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-016 (203052385337)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-015 (203052383792)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-004 (203052358504)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-005 (203052362224)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-003 (203052355864)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-002 (203052349827)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-006 (203052363990)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-008 (203052366368)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-009 (203052368204)
Press/Vacum W/ATM SNSR CG1146-W00876 Tegal 901e 903e Etcher DQ-4-007 (203054173676)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-007 (203052365648)
AC Power Supply AC Service Item CE 1004-001001, Tegal 901e 903e Etcher DQ-5-010 (203054149003)
ENDPT DET CD1151-00102 & Display 99-125-008,Tegal 901e 903e Etcher DQ-5-011 (203054190382)
DC Power Supply Item CEL 1005-00202 For Tegal 901e 903e DQ-1-010 (203054122801)
AC Power Supply AC Service Item CE 1004-00402, Tegal 901e 903e Etcher DQ-5-008 (203054145398)
AC Power Supply AC Service Item CE 1004-00901, Tegal 901e 903e Etcher DQ-5-009 (203305004141)
AC Power Supply AC Service Item CE 1004-00402, Tegal 901e 903e Etcher DQ-5-007 (203054144303)
AC Power Supply AC Service Item CE 1004-00402 , Tegal 901e 903e Etcher DQ-5-005 (203054140745)
Pressure/ Vacuum W/ATM SNS CC1146-01201, Tegal 901e, 903e , 915 Plasma Etcher (203932060548)
Wafer Transfer CW1078 For Tegal 901e 903e AWD-D-3-2-13 (202987418862)
Front Control Panel Display CD 1011 For Tegal 901e 903e AWD-D-3-2-4 (202987343921)
RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-9 (202987394054)
RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-10 (202987396422)
RF Matching RF Delivery CR 1044 For Tegal 901e 903e AWD-D-3-2-8 (202987391734)
80-200-342 Band Cont Fem 125pin for Tegal 901e 903e Plasma etcher (203035257991)
Display 99-125-008, EEE FLIP 03601-22-040 Tegal 901e 903e Etcher DQ-5-012 (203054196215)
Display 99-125-008, EEE FLIP 03601-22A-040 Tegal 901e 903e Etcher DQ-5-013 (203054198419)
Display 99-125-008, EEE FLIP 03601-22-040 ?Tegal 901e 903e Etcher DQ-5-014 (203054200767)
Display 99-125-004 ,EEE FLIP 03601-22-040 ?Tegal 901e 903e Etcher DQ-5-015 (203054202102)
Press/Vacum W/ATM SNSR CG1146-01301 ,Refurbished Tegal 901e 903e Etcher DQ-4-006 (203054170463)
Item CR1113-00301 W/ 31-086-004 RF Matching Network ,Tegal 901e 903e DQ-2-010 (203052371449)
RF Plasma Products T-502S 500W , cr1087-20101rw ? 80-055-140 ? Tegal DQ-4-001 (203054150999)
RF Plasma Products T-502 500W RF Generator For Tegal 915 965 Etcher DQ-4-002 (203054158999)
CW1078-40401 Wafer Transfer W/99-274-003 PCB For Tegal 901e 903e DQ-1-006 (203054107754)
80-202-297 for Tegal 901e Tegal 903e (204516353376)
80-202-298 for Tegal 901e Tegal 903e (203130928020)
Lintec MC-2100 O2 20 SCCM MFC Took From Tegal 901e 903e Plasma Etcher DX-2-013 (203934429143)
Unit UFC-1400A N2 1000 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-005 (203944514229)
UFC-1300 50 SCCM He MFC Took From Tegal 901e 903e Plasma Etcher DX-2-002 (203934403810)
Unit UPC-1300 N2 2000 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-011 (203944530989)
Unit UFC-1000 CHF3 50 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-023 (203944556851)
Unit UPC-1300 N2 SLM MFC , From Tegal 901e 903e Plasma Etcher DX-3-001 (203934722873)
Unit UFC-1101 SF6 10 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-016 (203944540255)
Unit UFC-1100A SF6 10 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-034 (203944598055)
Unit UPC-1300 N2 2 SLM MFC , From Tegal 901e 903e Plasma Etcher DX-3-026 (203944567858)
Unit UFC-1100A SF6 15 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-4-001 (203944601519)
UFC-1020 SF6 50 SCCM MFC Took From Tegal 901e 903e Plasma Etcher DX-2-007 (203934414891)
Unit UFC-1100A He 200 SCCM MFC ,From Tegal 901e 903e Plasma Etcher DX-2-021 (203934467103)
UFC-1100A O2 15 SCCM MFC Took From Tegal 901e 903e Plasma Etcher DX-2-001 (203934393182)
Unit UFC-1020 O2 15 SCCM MFC ,From Tegal 901e 903e Plasma Etcher DX-2-020 (203934465391)
Unit UFC-1100A N2 2 SLM MFC , From Tegal 901e 903e Plasma Etcher DX-4-002 (203944604075)
Unit UFC-11200A He 200 SCCM MFC ,From Tegal 901e 903e Plasma Etcher DX-2-025 (203934472773)
Unit UFC-1020 O2 50 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-2-031 (203934720894)
Unit UFC-1100A C2F6 100 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-020 (203944552062)
Unit UFC-1020 O2 15 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-003 (203934724284)
Unit UFC-1100A CHF3 50 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-008 (203944523808)
Lintec MC-2100 He 100 SCCM MFC Took From Tegal 901e 903e Plasma Etcher DX-2-014 (203934427205)
Unit UPC-1300 N2 225 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-032 (203944592006)
Unit UFC-1200A BCL3 100 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-027 (203944568545)
Unit UFC-1020 HE 200 SCCM MFC , From Tegal 901e 903e Plasma Etcher DX-3-004 (203944512598)
40-375-001 PAD ISOLATION for Tegal 9013 903e Plasma etcher (203035246143)
1410-00321 / 737-879 / for Tegal 901e Tegal 903e?Myriad Semiconductor Equipment (204457336982)
55-005-001 for Tegal 901e Tegal 903e (204457330295)
99-224-001 PCB, PCB, CSN-1, CTR SNSR for Tegal 901e Tegal 903e Plasma Etcher (203189327388)
CW1078 W00262 Wafer Transfer W/99-200-006 PCB For Tegal 901e 903e DQ-1-004 (203054104650)
Unit UFC-1100A N2 2SLM MFC , From Tegal 901e 903e Plasma Etcher DX-3-021 (203944553939)
CR1113-00801 RF Matching Network ,Tegal 901e 903e,replacement of CR1113-00301 (203408653764)
PN 46-273-001 A For 4 Inch Tegal 901e 903e AWD-D-3-2-7-001 (202987375310)
Digital Monitor VT420 For Tegal 901e 903e AWG-1-3-002 (203002172831)
PN 46-275-001 For 6 Inch Tegal 901e 903e AWD-D-3-2-6 (202987367955)
Pressure/ Vacuum W/ATM SNS CC1146-00301 Tegal 901e, 903e , 915 Plasma Etcher (203932072983)
Pressure/ Vacuum W/ATM SNS CC1146-01201, Tegal 901e, 903e , 915 Plasma Etcher (203932032041)
Spatula Driver Item CW 1078-30203 For Tegal 901e, 903e , 915 Plasma Etcher (203932050125)
Gas Delivery Item CG 1015-00500 W/ 99-126-005 ,Tegal 901e 903e Etcher DQ-4-004 (203054165977)
55-004-001 for Tegal 901e Tegal 903e (204457328033)
55-008-001 for Tegal 901e Tegal 903e (204457327430)
Spatula Driver Item CW 1078-60401 For Tegal 901e, 903e , 915 Plasma Etcher (203932078795)
PN:80-080-072 CYL, Dbl Ended 1/2S, 1 1/8B Tegal 901e Tegal 903e Plasma Etcher (203030867276)
56-042-001 NUT ELEV for Tegal 901e Tegal 903e Plasma Etcher (203035247380)
Pressure/ Vacuum W/ATM SNS CC1146-01201, Tegal 901e, 903e , 915 Plasma Etcher (203932040811)
80-198-054 Valve, EVO-3M-24 for Tegal 901e Tegal 903e Plasma Etcher (203035318863)
0994-30034 #10 Nylon Washer for Matrix 105 Plasma Asher Descum (203030843737)
80-200-127 Bearing for Tegal 901e Tegal 903e Plasma Etcher (203035308977)
80-200-121 BBRG FLG DSHLD 1/4B for Tegal 901e Tegal 903e Plasma Etcher (203035308813)
80-095-794 UPC,N2,225SCCM ,Tegal 901e Tegal 903e Plasma Etcher (203030862697)
46-467-001 for Tegal 901e Tegal 903e (203130938585)
064-0002 Ceramic Ring, 4", for Tegal 901e Tegal 903e Plasma Etcher 40-294-003 ? (203035312794)
Unit UFC-8160 N2 20 SLM MFC , From Tegal 901e 903e Plasma Etch DX-4-009 (203944616606)
80-080-054 CYLINDER DBL-PVT MT 10S, 1-1/16B,Tegal 901e Tegal 903e Plasma Etcher (203030790447)
31-233-006 Assy., Loader Spatula for Tegal 901e Tegal 903e Plasma Etcher (203035247966)
CW1105-00202 Carriage Assy. for Tegal 901e Tegal 903e Plasma Etcher (203035309699)
80-202-034 GROMMET 5/16ID 1/2DIA HOLE for Tegal 901e Tegal 903e Plasma Etcher (203189324362)
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