NOVELLUS Other Process Engineering Equipment, Parts, and Accessories

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Valve MONOVAT VAT 02112-BA24-APN1/0809A-624982 NOVELLUS 60-135033-00 (121644944243)
Controller Novellus 02-321648-00 DIGITAL DYNAMICS Vector HDSIOC 2 Firmware 5. (123796772235)
OEM Part NOVELLUS 30-259812-00 Coil EM D Coil HCM PVD (122072364617)
Controller Novellus 02-8049241-00 Dosing System Controller (123766416632)
8548 NOVELLUS 20'' SHIELD ADAPTOR GEN 2 16-260355-00 (112401389309)
Controller TRAZAR ECC1-4F NOVELLUS 27-153218-00 ECC / ESC (121568975756)
Novellus Lam Electrostatic Chuck 02-166097-00 Original New (332664580481)
OEM Part Novellus 17-271438-00 ADAPTER SHIELD 300mm (273396998264)
11972 NOVELLUS ASSY, HEATER BLOCK, 2&3KW, 6FORKS, SEQUEL, 8" 19-00154-00 (123400492171)
11710 NOVELLUS TRANSFER (INDEX) PLATE 15-055437-00 (123355598801)
1928 ENI PLASMALOC 2-HF LOW FREQ GEN, NOVELLUS P/N: 27-00196-00 PL-2HF-11451-55 (123148971615)
10268 NOVELLUS RING, ANODE, GRIT, HCM, PVD300 02-268740-02 (123081363448)
4650 NOVELLUS ASSY, END EFFECTOR, ATR8, T-BEAM, VAC 02-270536-03 (123321994272)
Generator ULTRASONIC Sweepsonik 40-S2X-24T-208V-A-CE NOVELLUS (122010414553)
OEM Part NOVELLUS 02-284042-00 CU,ASSY,EBR DIPSNS ARM,NO STREAK,SBR-XT (123122432482)
Kit NOVELLUS 15-127251-00 SPEED INJECTOR SET (36 PIECES) (122027985778)
OEM Part NOVELLUS A95-122-01 Gasonics Load Lock Door External Assy. (122018202757)
OEM Part Novellus 15-183815-00 Ring Ceramic (122010424701)
7021 NOVELLUS HEATER PEDESTAL 300MM ASSY 02-298156-00 (113739809526)
12851 NOVELLUS ASSY, SYSTEM CONTROLLER, P100/16MEG 02-028522-00 (113634487172)
OEM Part Novellus 15-118122-00 INSULATOR TARGET Cleaned (122010422316)
OEM Part Novellus 15-307111-0 Shield Ring Ceramic 300mm Cu cleaned (122010422159)
Valve Pneumatic panel assy, load lock Gasonics A94-042-01 (122010401886)
10220 NOVELLUS HEATER PEDESTAL 02-384125-00 (112745963379)
10221 NOVELLUS HEATER PEDESTAL 02-384123-00 (122906490325)
7667 NOVELLUS CHAMBER COVER W/ PHOTOELECTRIC SWITCH(E3S-AT66-D) 15-257176-01 (122411585712)
7160 NOVELLUS CHAMBER COVER W/ PHOTOELECTRIC SWITCH (E3S-AT66-D) 15-257176-02 (112534599777)
7020 NOVELLUS HEATER PEDESTAL BLOCK 02-298157-00 (113739809576)
OEM Part Novellus 15-276687-00 RING, CERAMIC (122010422897)
PCB Saber CMS Control ECI TECHNOLOGY TLA-510 Novellus (121715379223)
Cable NOVELLUS 21-602279-013 INTERPOSER PCBA CMT (123102168500)
Cable NOVELLUS 21-602279-010 INTERPOSER PCBA CMT (123102168240)
11477 NOVELLUS CERAMIC RING 15-270179-00 (113165635808)
12852 NOVELLUS SYSTEM CONTROLLER, P166/64, 24V 02-127707-00 (113659720010)
4373 NOVELLUS MEMBRANE 02-273492-00 (123260687316)
4374 NOVELLUS FILTER 16-167627-00 (123311848866)
8070 NOVELLUS CHAMBER COVER 15-164135-01 (122418877562)
11688 NOVELLUS ANODE, GROOVED, BOLT DOWN, 200MM 15-256103-00 (123343341817)
4376 NOVELLUS SHIELD, CHAMBER, TOP HAT, PC 300 17-157996-00 (113047399547)
9816 NOVELLUS HEATER PEDESTAL 02-033134-00F (112619165994)
12531 NOVELLUS WINDOW HATCH COVER 15-129181-00 (113406224997)
9818 NOVELLUS HEATER 03-00258-00G (122776074270)
Cable NOVELLUS 21-602279-014 INTERPOSER PCBA CMT (123150646634)
Kit LAM 04-293001-00 NOVELLUS KIT,WINDOW, OPTO SENSOR PAIR (123109570367)
7326 NOVELLUS PCB HEATER ISOLATION BOARD 27-122190-00 REV A 03-122190-00 REV A (123097130031)
C1100 NOVELLUS TRUST 2 AXIS SPINDLE ASSY 02-276537-00 (123754501756)
PCB TAC320 Chem Control ECI TECHNOLOGY RCI-F 94V0 3701 NOVELLUS Sabre (121610303390)
PCB NOVELLUS 02-8049458-00 Dosing System Controller BD (123098127384)
Pump ECI TECHNOLOGY TQ703297 NOVELLUS 27-260238-00 CU, VMS, PUMP, ASSEMBLY (123098127804)
8960 NOVELLUS SPEED DOME (14-045101-06) - (112453635404)
Robot Novellus-Gasonics 02-1322 END,EFFECTOR,THETA AURA 2000 ASYST 04220-001 (123100147576)
OEM Part Novellus-Gasonics A01-012-01 CHAMBER BOTTOM AURA 1000 (123146408672)
Valve NOVELLUS A95-121-01 Gasonics Loadlock interior chamber door assembly (122009436232)
OEM Part Novellus 17-260361-00 300MM PEDESTAL SHIELD, GRIT BLAST PVD (122010420976)
Thermo Couple (TC) type S 2 position Zone 3 Novellus 70-0019 Gasonics (122335464066)
Wafer NOVELLUS 15-053394-02 C1/C2 MINIMUM AREA CONTACT FORK 200mm (121593458271)
OEM Part NOVELLUS 15-00438-00 BRACKET (122009468458)
Gasket Novellus 78-0188 gasonics gasket graphite (122335464082)
Sensor Novellus 38-0210 Gasonics switch home sensor (122366856647)
OEM Part Novellus 15-00409-00 WINDOW, PYREX chipped (122967240237)
Robot NOVELLUS Gasonics 0770-727470 SHAFT,ROBOT,WRIST (122011360069)
Tubing NOVELLUS GASONICS A95-150-01 Assy Load Lock Purge Line Weldment (122018202932)
OEM Part Novellus 16-00037-02 MANIFOLD, VACUUM 4" C1/2 (122803499342)
OEM Part Novellus 71-117097-00 PLATE, ALIGN, PED, END EFFECTOR (122016095578)
PCB PLASMA / LAMP FAILURE DETECTION Novellus GASONICS A90-031-03 (121710125521)
Sensor NOVELLUS Gasonic 90-2724 PCA,PCB,CURRENT SENSOR (121574697013)
Robot NOVELLUS 02-273860-01 End Effector 200mm Brooks Automation 121669 (121891078501)
OEM Part Novellus 15-283510-00 SHOWERHEAD, 300MM R2+, CIRCU (122010425137)
OEM Part Novellus 17-271438-00 ADAPTER SHIELD 300mm (122027986383)
OEM Part Novellus 17-276330-00 LINER LOWER PROCESS (122010424849)
OEM Part Novellus 17-260360-00 Barrel Shield (122027986574)
OEM Part Novellus 17-276607-00 SHIELD HCM ADAPTER ARCS SPRAYED (123501050753)
Wafer TC ASSEMBLY,A2000 JIG NOVELLUS Gasonics 94-2730 (122015129122)
OEM Part Novellus-Gasonics A95-035-00 Door Nest (123148320707)
OEM Part Novellus 15-277663-00 Ring Ceramic (122010424467)
Kit 90 day PM Kit Novellus C2 Altus (122029071744)
OEM Part Novellus 19-033261-00 Lift Pin Bellows (121857564020)
Robot NOVELLUS Gasonics 95-4406 860 VACUUM,ARM,EFFECTOR,RND,QSS 0 (122015129441)
NOVELLUS Gasonics 95-4406 860,VACUUM,ARM,EFFECTOR,RND,QSS ROBOT / WAFER (391848669532)
OEM Part NOVELLUS Gasonics A95-219-01 Station Wafer Cooling (122027985098)
OEM Part Novellus 15-307111-00 Shield Ring Ceramic GRIT (121729275851)
Valve Gate 204959 VAT 233635 Novellus 60-308307-00 (121685465262)
Hardware GRAINGER 19-2651 NOVELLUS NYLON BUSHING / SHOULDER, 1/4 (PKG 10) (123148319973)
Valve NOVELLUS A01-357-01 Gasonics DOOR,CHAMBER (122014138307)
Controller Novellus 02-109472-00 ASSY,INTLK,HDP SIOC 1 SPEED 1 Interlock (121685963185)
Lens SAPPHIRE window 5.0E-2IN, Novellus 15-260932-01 (122009490453)
OEM Part Novellus 15-183800-00 EMBOSSED SHOWERHEAD BACKING PLATE (122010424998)
Gasket PKG 70 C-Seal, Metal Garlock Helicoflex H-308071 Novellus 22-266894-00 (121755277911)
OEM Part NOVELLUS 01-6129 ARM DOOR CLOSURE RIGHT; 1544613 Gasonics (122009437307)
Flowmeter Gems 191055 Rotary GPM SS, TYPE: RFS, 24VDC Novellus 02-142322-00 (121569090921)
O-Ring Novellus 27-402813-00 O-RING PKG 2 (122030102536)
Robot Novellus-Gasonics 95-4406 860,VACUUM,ARM,EFFECTOR,RND,QSS ASYST 04220-001 (123100146878)
Valve GATE, BONDED 300MM, CHEMRAZ NOVELLUS 60-300514-00 Chemraz 5641A1282SS639 (121648866666)
OEM Part Novellus-Gasonics A95-171-01 Load Lock Assy Kwik Flange Fitting (122009514573)
PCB NOVELLUS Gasonics 90-2735 PCA, interlock board (122010410314)
OEM Part NOVELLUS A01-328-01 Gasonics Cover Top Process Chamber (121947433978)
Lens Sapphire Window 8.0-2in DIA, Novellus 15-260932-04 (122009461829)
OEM Part Novellus 17-157344-00 BRACKET, SLIT VALVE, GRIT (122015138657)
Sensor Novellus 93-0122 Gasonics position sensor (122366856519)
Flowmeter MALEMA M-10000-T2013-02-002-FLR NOVELLUS 34-271272-00 0.1-1 LPM Teflo (123102168624)

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